Simultaneous Back Glass/Front Pellicle Inspection

March 29, 2016 | Comments Off on Simultaneous Back Glass/Front Pellicle Inspection

Small footprint, Low cost, High ROI, Easy to use, Low MTTBF (03 years), requires no maintenance. Stand alone desk top unit or integrated into Reticle stockers, cleaners, automatic handling systems. Provides the end users with an automated Particle detection System leading to higher yields. The PDS platform of...